Zonal vs. Average Process Control Monitor (PCM)
by
YieldWerx
Product Engineering
As standard wafer sizes have grown, the variation in electrical performance across a wafer has increased. Averaging the electrical results from a typical five-site Process Control Monitor (PCM) has become inaccurate. To improve the accuracy of this analysis, yieldWerx Enterprise allows you to break a wafer into “zones” and use the PCM data from the nearest zone for correlation analysis and more.
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